基板二次预对准定心定向数学模型的研究

摘要

High-precision pre-alignment sub-system is a crucial component for modem lithography equipment.There are several alignment actions in the process of uploading wafer,including wafer pre-alignment,wafer secondary pre-alignment and wafer alignment.In order to establish the mathematical model of secondary pre-alignment eccentricity and orientation,the algorithm of computing eccentricity and orientation based on the principle of wafer secondary pre-alignment is designed in this paper.Then it simulates the algorithm and the mathematical model of secondary pre-alignment eccentricity and orientation was established based on the input and output.The establishing of this model can provide basis for improving the precision of secondary pre-alignment which is useful in practical application.%高精度的预对准分系统是设计现代光刘机需要解决的核心问题之一.在光刘机上载基板的工作过程中,需要进行多次基板对准,主要有:基板预对准、基板二次预对准、基板对准.为了建立基板二次预对准定心定向数学模型,基于基板二次预对准的工作原理,提出了计算定心定向的算法,对该算法进行了仿真分析,并根据输入输出建立了定心定向数学模型.该数学模型的建立,为提高二次预对准精度提供了依据,对实际应用有一定的指导作用.