多通道ADC一致性的高精度测量方法

摘要

为了满足散射计数字处理系统在多通道采样后的数据处理的要求，提出了一种高精度的多通道ADC一致性测量方法。对多通道ADC的幅度一致性、直流偏置一致性和延迟一致性3个重要指标进行了定量分析，并通过开展实验完成了实测数据的采集和分析。实际应用表明，这种测量方法可靠有效，能够为后期误差分析和矫正提供重要的参考依据。%In order to satisfy the requirement of data processing in multichannel sampling circuit of scatterometer, a high-precision measurement is designed to measure the consistency of multichannel ADC in this paper. This paper provided the quantitative analysis of amplitudes gain consistency, the consistency of DC bias consistency and the consistency of sample delay consistency precisely. This paper collected a large amount of data to analyze the consistency by experiment. The experiment and application show that this measuring method is accurate. And it can provide reference for the data error correction.