复合钒钛酸干凝胶薄膜的湿敏特性研究

摘要

采用sol-gel法制备了复合钒钛酸干凝胶(H_2V_(10)Ti_2O_(30-y)·nH_2O)薄膜,并对其湿敏特性进行了研究.结果表明:该薄膜为层状结构.用此薄膜制备的湿敏元件,在RH为11%～95%的范围内,感湿特性曲线线性好,其响应、恢复时间分别为5 s和20 s,湿滞为RH 2%,感湿温度系数为RH 0.45%/℃,并具有良好的稳定性.H_2V_(10)Ti_2O_(30-y)·nH_2O干凝胶薄膜湿敏元件的灵敏度和湿滞均优于复合钒酸(H_2V_(12)O_(31-y)·nH_2O)干凝胶薄膜湿敏元件.%Poly-vanadium-titanium acid xerogel(H_2V_(10)Ti_2O_(30-y)·nH_2O)thin films were fabricated by sol-gel method and their humidity sensitive properties were studied. The results show that the thin films have a layered structure. The humidity sensitive property curve of the humidity sensor prepared by this thin films is good linearity in the range of RH 11%～95%. Its response time and recovery time of the humidity sensor are 5 s and 20 s, respectively. The humidity hysteresis is RH 2% and the temperature coefficient of the humidity is RH 0.45% /℃ for the humidity sensor. The humidity sensor appear good long term stability. The sensitivity and humidity hysteresis of the humidity sensor are superior than those of poly-vanadium acid xerogel thin film humidity sensors.