氧化铝对钙硼硅基板材料的改性

摘要

The devitrification of calcium borosilicate glass substrate materials was improved by adding Al_2O_3. And the influences of adding Al_2O_3 on sintering properties, phase compositions, microstructures and dielectric properties of the glass were also discussed. The results show that the devitrifying glass becomes transparent and linear expansion coefficient reduces to 10.5×10~(-6) ℃~(-1) with adding w(Al_2O_3) of 9%. The main crystal phases of samples are CaB_2O_4, α-silica and CaSiO_3. At 10 MHz, the permittivity ε_r of simples changes a little with the mass fraction of Al_2O_3 from 0 to 9% and the dielectric loss tanδ is also below 1.1×10~(-3) at best sintering temperature.%通过添加Al_2O_3改善了钙硼硅玻璃基板材料的失透现象,研究了Al_2O_3对钙硼硅材料的烧结性能、相组成、线膨胀系数和介电性能的影响.结果表明:试样的晶相均为CaB_2O_4、α-石英和CaSiO_3,添加Al_2O_3不能改变晶相种类.当w(Al_2O_3)为9%时,基础玻璃由失透变为透明;线膨胀系数降低至10.5×10~(-6) ℃~(-1),tanδ低于1.1×10~(-3),Al_2O_3添加前后,试样的ε_r变化不大(10 MHz).