首页> 中文期刊> 《电子元件与材料》 >氧化铝-8YSZ叠层制备极限电流型氧传感器

氧化铝-8YSZ叠层制备极限电流型氧传感器

         

摘要

采用氧化铝作支撑材料制备了一种新型结构的极限电流型氧传感器.该传感器经由氧化铝粉和8YSZ粉分别压片并烧结成瓷,再经厚膜丝网印刷及叠压共烧制成.在温度为973 K(700℃)、氧体积分数为1.4%~14%条件下,对该传感器的气敏特性和响应时间进行了研究.结果表明:该传感器在上述氧浓度范围内具有较好的电流平台特性,且极限电流与氧浓度有良好的线性关系;气体在该传感器中的扩散为Knudsen扩散;该传感器的响应时间在8s以内且呈现较好的重复性,长时间工作性能较稳定.%A limiting current oxygen sensor with a novel structure was fabricated with AI2O3 as supporting material. The AI2O3 and 8YSZ powders were respectively pressed and sintered to ceramic chips with different sizes, and then the sensor was fabricated by screen printing and muitilayered co-firing the chips. The response time and I-V curve of the sensor were studied at 973 K(700 °C )and an oxygen concentration of 1.4%-14% (volume fraction). The results show that, under the employed testing condition, limiting current platforms clearly present in the I-V curves of the sensor, and the limiting current is linearly proportional to the oxygen concentration. Moreover, the diffusion of gas in the sensor obeys the Knudsen diffusion model. The response time of the sensor is below 8 s and shows good repeatability, leading to a stable long-term performance.

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