一种基片集成波导可调滤波器的设计

摘要

A substrate-integrated-waveguide (SIW) tunable filter based on micro-electromechanical systems (MEMS) switch was designed. The dimension of the filter is 40 mm×57 mm×0.708 mm. The tunable filter with frequency range of 4.96-5.78 GHz consists of two substrate layers, and the substrates used to design a tunable SIW cavity were FR4_epoxy at top and Rogers RT/Duriod 5880 at bottom. HFSS simulating results show that the tunable filter exhibits an insertion loss lower than 0.5 dB and a return loss lower than –15 dB.%应用微机电系统（MEMS）开关设计了一款基片集成波导（SIW）可调滤波器。该滤波器整体尺寸为40 mm×57 mm×0.708 mm，调节范围4.96~5.78 GHz，滤波器由两层介质基片构成，上层介质为FR4_expoy，下层介质为Rogers RT/Duriod 5880。通过HFSS仿真，结果表明，该滤波器插入损耗不大于0.5 dB，回波损耗不大于–15 dB。