制备条件对Bi2Te3薄膜导电性能的影响

摘要

通过物理气相沉积法在石英基底上于不同条件下制备出五种Bi2Te3薄膜,并且利用扫描电子显微镜和XRD对各薄膜样品进行表征,最后运用四探针测试法测试样品导电性能.结果表明:制备温度和沉积时间对Bi2Te3薄膜的表面形貌和样品膜的导电性能影响很大;制备温度越高、沉积时间越长,所制薄膜的均匀度及致密度越高、导电性越好.%Bi2Te3 thin films were prepared by physical vapor deposition on quartz substrate under five different preparation conditions.Each sample was characterized by scanning electron microscopy and XRD,and its conductivity was tested by the method of four point probe.The results show that the preparation temperature and deposition time have great influence on Bi2Te3 thin film surface morphology and the conductivity.The higher the preparation temperature and the longer the deposition time,the better the evenness,density,and conductivity of thin film.