在规模化生产制作单晶硅太阳能电池过程中，控制扩散质量是提升电池质量和效率的关键。在分析了设备及工艺方面存在的影响扩散均匀性因素的基础上，提出了优化扩散均匀性的实验方法，包括：在硅片表面上制作二氧化硅薄膜来减缓磷扩散的速度；在扩散时控制小氮与氧气的流量比例；减少扩散过程中温度波动对扩散结果的影响；在炉口区域设置较高的温度进行温度补偿；调整炉内压强使输入输出达到动态平衡等。试验证明这些方法可以改善电池电性能，并对工业化生产具有一定的参考价值% In the manufacture of crystalline silicon solar cells, it is important to control the diffusion quality for improving the cell quality and efficiency. On the basis of analyzing the effect of the diffusion uniformity on the equipment and the craftwork, the experimental methods for the optimizing diffusion uniformity are presented, in⁃cluding P diffusion is slowed down using SiO2 sheet, the flux of N2 and O2 is controlled in the diffusion, the effect of the temperature fluctuation on the diffusion result is reduced, the temperature is compensated by setting the high temperature in the throat opening, the pressure is adjusted for achieving the dynamic balance. The experiment shows that these methods are helpful for improving the performance of solar cells and guiding the production of in⁃dustrialization.
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