A fine polycrystalline ZnO thin film with 0.3～0.6 μm grain size was obtained by sol-gel process and a consequential heat treatment at 500℃. The process of preparing ZnO thin film was analysed. The sensitivity and conductivity of ZnO thin films as combustible gas (CO, CH4,H2) sensor as well as the influence of catalyst and pH value of the precursor on its sensitivity were studied in detail. The structure characteristics of ZnO thin film by different process were irlvestigated by X-ray diffraction, thermal analysis and photoelectron spectrometer. The atomic ratio of Zn to O on the surface of ZnO thin film was found to be 1.14:1 measured from XPS result. The conductivity of the thin film increases greatly when doped with Al3+ ion but decreases while doped with Na+
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