In recent years, the field of machining at home and abroad continues to research and development of cryogenic manufacturing, cryogenic technology can be used to the field of ultra - precision machining by this set of device, through the method of heating liquid nitrogen to produce cryogenic nitrogen gas, that can be provided air pressure 0~0. IMPa, temperature - 150℃~0℃ continuously adjustable, temperature accuracy better than ±2℃ cryogenic nitrogen for CNC. In this paper the flow and design of the device system were described in detail, the experiment proved that this set of devices fully met the technical specifications, system design was reasonable, the structure was simple, it was easy to control and operate.%近年来,国内外机械加工领域陆续研究开展低温加工方面的研究.本套装置将低温技术运用于超精密加工领域,通过液氮加热产生低温氮气的方法,为数控机床提供气压0 ～0.1MPa,温度-150℃～0℃连续可调,控温精度优于±2℃的低温氮气.文中对该装置系统流程和设计做了详细的介绍.经实验证明,本套装置完全达到技术指标,系统设计合理、结构简单、易于控制和操作.
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