晶圆制造物料运输系统实时调度方法

摘要

The promotion of efficiency of transporting system is significant to the Semiconductor Wafer Fabrication System(SWFS). To reduce the average traveling time, the average waiting time, and blockages in the Interbay system, this paper proposes a new real-time method using Hungarian algorithm. Simulation results based on data of 300 mm wafer fabrication systems show that this method outperforms the traditional schedule approaches in term of overall efficiency and performance of Interbay material handling system.%Interbay物料运输系统的运行效率对晶圆制造系统的影响较大.为减少运输小车平均搬运工件时间、晶圆工件的等待时间和运输小车的临时性堵塞,提出一种基于匈牙利算法的实时调度方法,并建立工件调度模型.基于300 mm晶圆制造系统数据的仿真结果表明,与传统的Interbay物料运输调度方法相比,该方法能有效提高Interbay物料运输系统的综合性能.