光栅刻划机的建模与仿真方法研究

摘要

用于制作母光栅的光栅刻划机的性能指标直接决定最终生产的光栅质量.为此,采用基于虚拟样机的联合仿真策略,代替传统的物理样机开发.利用动力学分析软件Pro/Engineer和控制仿真软件Simulink分别建立光栅刻划机机械动力学模型及控制系统模型,实现机电一体化仿真分析.根据仿真结果确定控制系统参效,实验结果表明,使用该方法可降低开发成本,提高研发效率.%Grating ruling engine, which is used to manufacture the master grating, directly determines the final quality of the production of grating. In this paper, co-simulation based on virtual prototype replaces the traditional physical prototype development. Mechanical dynamic analysis software Pro/Engineer and control simulation software are used to build a grating ruling engine of mechanical dynamic model and controller model respectively. The mechatronics simulation is achieved and from the simulation result, the control parameter is determined. Using this method, cost is reduced and the efficiency of research is improved.