叉指电容对铁电薄膜移相器相移影响的研究

摘要

The expriment aims to study on the relationship the between capacitance value and the effective dielectric constant of phase shifter. Quasi-static field method together with distributed parameter circuit model are adopted to analyse the coplanar waveguide (CPW). The high frequency simulation software (HFSS) is used to verificated the calculating the vacuum capacitance of different structures. The results show that the relationship between capacitance value and the effective dielectric constant of phase shiftert is Approximately linear.%文章采用准静态场法和分布参数电路模型分析计算了共面波导结构(CPW)铁电薄膜移相器的电容值与有效介电常数,通过对高频仿真软件HFSS的模拟结果与计算的不同结构电容值间的验证,发现电容值与有效介电常数表现出一种近似的线性关系.