塑封器件声学扫描显微镜检查技术及标准探讨磁

摘要

塑封器件已经大量在工程中使用，需要使用非破坏性的声学扫描显微镜检查技术来有效剔除存在早期缺陷的塑封器件。塑封器件典型的缺陷包括分层、空洞、裂纹。论文描述了典型的三种扫描模式，提出了提高声扫试验效率的方法，并且对相关的声学扫描显微镜检查技术标准进行了探讨，提出了改进的建议。%The PEM has been widely used in the project ,and the non‐destructive SAM technique is used to detect the defect of PEM .The defect of PEM includes delamination ,void ,and crack .The three kinds of scanning mode of SAM are described ,and the method is provided to improve the efficiency of SAM .The standard of SAM is discussed ,and some sug‐gestion are made to improve the technique .