一种数字集成电路标准样片的设计实现磁

摘要

Reference materials are a good way to achieve microelectronic traceability. This paper focuses on the simula‐tion of parameters of digital IC by circuit design, and research on the uncertainty of reference materials, which can improve the programmability and accuracy of reference materials. Therefore, prepared reference materials are suitable for calibration and comparison of ATE. Finally, the paper presents the evaluation of uncertainty and results.%标准样片是实现微电子量值溯源和传递的良好途径，论文着重于通过电路设计实现对数字集成电路参数的模拟，并对标准样片测量不确定度评估展开了相应的研究，用以提升标准样片参数的可编程性和量值的准确性，使之适合用于集成电路测试系统的检定、校准以及比对。最后给出了标准样片的不确定度评定和测量数据。