基于FEMAG-CZ热场仿真软件的单晶炉热场分析

摘要

FEMAGSoft company EMAG-CZ thermal field simulation software with a single crystal Czochralski method simulation of thermal field simulation,made using the temperature gradient thermal field,thermal field through the simulation shows designed to meet the growth requirements of single-crystal rods.%基于FEMAGSoft公司的EMAG-CZ热场仿真软件具有模拟提拉法生长单晶体的热场仿真功能，提出使用温度梯度分析热场，通过仿真证明热场设计合理，满足生长单晶棒的要求。