Key;
Laboratory;
of;
Functional;
Materials;
for;
Informatics,;
Laboratory;
of;
Nanotechnology,;
Shanghai;
Institute;
of;
Micro-System;
and;
Information;
Technology,;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
200050;
School;
of;
the;
Chinese;
Academic;
of;
Sciences,;
Beijing;
100049;
Storage;
Technology,;
lnc.,;
1171;
Sonora;
Court,;
Sunnyvale,;
CA;
94086,;
U.S.A.;
相变存储器; 存储材料; 低功耗; Ge2Sb2Te5; 应用; 相变材料; 溅射靶材; 复合材料;