Surface finish of micro punch with ion beam irradiation

摘要

Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining.Ar plasma was used for the ion irradiation process,which was generated by the electron cyclotron resonance(ECR)equipment.The surface finish processes of micro punch were carried out at irradiation angles of 45°and 10°,respectively.The surface roughness and topography were measured to estimate the quality of surface finish.The results show that the ion irradiation is very effective to reduce the surface roughness,which can be improved more significantly at irradiation angle of 10°than at 45°.The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.