利用水溶性聚三钼酸盐纳米线作为牺牲材料,通过模板法制备了纳米流体通道,其关键技术在于寻找到合适的牺牲材料.通过水溶液合成法,在常温常压下制备得到直径为20～150 nm的聚三钼酸盐纳米线,这些水溶性的纳米线在截面积极小的纳米通道中,能通过纵向劈裂迅速增加有效溶液接触面积,达到快速溶解的效果,能实现截面形状可控,是通道壁材料多样的纳米流体通道的理想牺牲材料.将纳米线与光刻技术相结合,分析其制备过程,能清晰观察到纳米流体通道的形貌.该技术对于微纳流体器件及系统的研究具有重要意义和价值.%There is a template method for the fabrication of nanochannels with water-dissolvable nanowires as the sacrificial material. The core technology of this method is finding the appropriate sacrificial materials. These nanowires. Diameters ranging from 20 nm to 150 nm and lengths up to a hundred microns, are fabricated at room temperature, one atmosphere, in aqueous solution. These nanowires can dissolve in aqueous quickly for observably increasing the surface with splitting. It is possible to obtain nanochannels with the desired shape of cross section, and desired types of channel material, such as metals and oxides, by photoetching technique. And the nanochannels as fabricated are examined by SEM. This technique shows a good potential for the development of various microfluidic and nanofluidic devices.
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