电弧离子镀中Ti大颗粒空间传输过程中受力变化特征分析

摘要

电弧离子镀所制备薄膜中的大颗粒缺陷是研究热点之一,文中利用尘埃等离子体的理论,以Ti大颗粒为研究对象,对电弧离子镀中大颗粒空间传输过程中的受力进行了分析,主要包括重力、离子拖曳力、热泳力、电场力等4种类型,对其影响规律、作用大小以及综合表现进行了总结,为有效避免大颗粒在薄膜表面的沉积概率提出了理论依据.通过对大颗粒传输过程中的空间受力的计算,发现大颗粒受到自身重力、热泳力、电场力和离子拖曳力的综合作用是影响其在薄膜表面数目变化的主要原因.%The macroparticles defect in arc ion plating process is one of the research highlights.The forces of Ti macroparticles during spatial transmission were analyzed by using the theory of dust plasma,which contains gravity,ion drag force,thermophoretic force and electric force.The effects,action and the overall performances of those four types of forces were also summarized.A theoretical basis for avoiding the deposition of macroparticles on the film surface probability was then put forward.The spatial forces in the transport process of macroparticles are calculated,which explains that the combination of self-gravity,thermophoretic force,electric field force and ion drag force are the main reason for the change of the macroparticles number on the film surface.