退火处理对WC-DLC薄膜结构及性能的影响

摘要

In order to study the effects of annealing on the structure and properties of WC-DLC films,WC-DLC films were deposited on the surface of high speed steel by magnetron sputtering and annealed at different temperatures.The structure,tribological properties and corrosion resistance of the WC-DLC films annealed at different temperatures were systematically characterized,respectively.The results show that the WC-DLC films are amorphous.With the increase of the annealing temperatures,the relative content of sp3-C decreases.WC-DLC films annealing at 250 ℃ presents the optimal friction performances with wear rate is 1.25 × 10-7 mm3/Nm in ambient air and is 1.02× 10-7 mm3/Nm under deionized water.The corrosion resistance of WC-DLC film has no evident changes under 250 ℃ but degrades obviously when the annealing temperature is higher than 250 ℃.The annealing treatment has important influence on the thermal stability,tribo logical properties and corrosion resistance of WC-DLC films.%为研究退火处理对WC-DLC薄膜结构与性能的影响,采用磁控溅射技术在高速钢表面沉积WC-DLC薄膜,并作不同温度下的退火处理,对不同温度退火处理后的WC-DLC薄膜的结构、摩擦学性能与耐腐蚀性能进行系统表征.结果表明:WC-DLC薄膜呈现出非晶态特征,随着退火温度的上升,薄膜中sp3-C相对含量下降;当退火温度在250℃时,WC-DLC薄膜在大气环境下与去离子水环境下分别表现出最优的摩擦学性能,磨损率分别为1.25× 10-7 mm3/Nm与1.02×10-7 mm3/Nm.同时,当退火温度低于250℃时,WC-DLC薄膜的耐腐蚀性能无明显变化,但当退火温度高于250℃时,WC-DLC薄膜的耐腐蚀性明显下降.退火处理对WC-DLC薄膜的热稳定性、摩擦学性能及耐腐蚀性能有重要影响.