X射线光电子能谱仪的开放使用与管理

摘要

X ray photoelectron spectroscopy (XPS) is one of the most important methods for the qualitative and semi quantitative analysis of surface elements.It is an essential tool for the scientific research in surface analysis.How to improve the efficiency of the use of the instrument is a thorny problem.The opening and sharing of large-scale instrument to optimize the test efficiency has been proposed.In this paper, the experience of the opening usage of XPS is summarized.%X射线光电子能谱仪(XPS)是材料表面元素定性和半定量分析的重要手段之一,是表面分析科研工作的必备仪器.为提高测试效率,实施了大型仪器设备开放共享优化,总结了在推动XPS开放过程中管理的经验和体会.