超声复合研磨光学玻璃机理及表面特征

摘要

According to the brittle and hardness character of optical glass, the removal mechanism is discussed . The experimental result show that a high removal rate and the smooth high quality surface can be obtained under ultrasonic lapping.%根据光学玻璃硬度高和脆性大的特点,从理论上分析了超声波研磨加工光学玻璃材料的去除机理,试验表明,超声加工工具振动振幅为0.03～0.1mm,频率为16～ 25 kHz条件下,超声波的超精密加工光学玻璃比不加超声振动加工材料去除率高1.5倍左右,表面质量好,粗糙度值降低100％左右.