一种通用的电容式微机械陀螺接口电路研究

摘要

Based on the analysis of driving and sensing modal moving equation of capacitive vibratory microgyroscope, a universal interface circuit is studied. It contains two parts：detecting circuit and driving circuit. In detecting circuit, microgyroscope driving and sensing modal vibration detecting circuit is designed based on analysing C-V convert circuit. In driving circuit, the frequency control loop is designed by using the method of the phase locked loop to realize driving modals frequency stabilization, and the amplitude control loop is designed by using the method of commutating and DC voltage ajustment to realize driving modal amplitude stablization. In order to verify the scheme validity, a PCB is made including a fork capacitive vibratory microgyroscope. The experiment shows that the interface circuit can improve the sensitivity of gyroscope and the stability of scale factor effectively.%在分析电容式微机械陀螺驱动和敏感模态运动方程的基础上，提出了一种通用的电容式微机械陀螺接口电路方案。该电路包含检测和驱动电路两个部分，在检测电路方面以C—V检测电路分析为基础设计了陀螺驱动和敏感模态振动检测电路，在驱动电路方面重点研究了采用锁相的方法实现驱动模态稳频控制的频率控制回路和采用整流以及直流电压调整的方法实现驱动模态恒幅控制的振幅控制回路的设计。最后，为验证设计电路，针对一种音叉电容式微机械陀螺制作了PCB实验电路板。实验表明，该电路能够有效地提高陀螺的灵敏度和刻度因子的稳定性。