State Key Laboratory of Precision Measuring Technology and Instruments;
Laboratory of MicroNano Manufacturing Technology(MNMT);
Tianjin University;
Tianjin 300072;
People’s Republic of China;
Centre of MicroNano Manufacturing Technology(MNMTDublin);
School of Mechanical and Materials Engineering;
University College Dublin;
Dublin 4;
Ireland;
Extreme ultraviolet(EUV); Molecular dynamics(MD); Two-temperature model(TTM)Photoionization; Atomic and close-to-atomic scale manufacturing(ACSM);