锂电池极片涂膜测厚仪设计及精度分析

摘要

文章设计了一种基于微处理器的电感测微仪，把这项技术应用在锂电池极片涂膜的厚度测量中，通过一系列的试验对该电感测微仪性能参数进行了评价。试验数据表明，该测量仪具有良好的性能指标，能在精密和超精密测量领域中使用。%We designed a inductance micrometer based on the microprocessor, and we used the technology in the film thickness measurement about lithium batteries pole piece. Through a series of tests, we evaluated the inductance micrometer performance parameters. From the experimental data show that the measuring instrument has a good performance. It can be used in the field of precision and ultra-precision measurement.