首页> 外文期刊>力学学报:英文版 >DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS
【24h】

DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

机译:散装微机械流量计的设计,制造,测试和力学分析

获取原文
获取原文并翻译 | 示例
       

摘要

Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.
机译:具有四种不同类型传感结构的微机械压阻流量计已经过设计,制造和测试。压敏电阻通过p扩散定义在传感器的末端,其阻值约为3.5kΩ。惠斯通电桥配置有压敏电阻,以测量输出响应。遵循确定的关系,输出电压随空气流量的增加而增加。测试结果表明,为在整个工作范围内测量10L / M而设计的传感器具有所需的灵敏度。传感器芯片采用批量微机械加工技术制造,需要一组七个掩模。

著录项

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号