机译:散装微机械流量计的设计,制造,测试和力学分析
Institute of Microelectronics, Peking University, Beijing 100871, China;
LNM, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Microelectronics, Peking University, Beijing 100871, China;
micromachined flowmeters; bulk-micromachining; piezoresistivity; Wheatstone bridge;