机译:基于任意配置的壳体和波纹膜片的增量变形分析
Department of Mechanics and Engineering Science,Peking University, Beijing 100871, China;
Department of Mechanics and Engineering Science,Peking University, Beijing 100871, China;
Department of Mechanics and Engineering Science,Peking University, Beijing 100871, China;
Department of Mechanics and Engineering Science,Peking University, Beijing 100871, China;
Shell of revolution; MEMS diaphragms; Incremental equations; Arbitrary configuration; Nonlinear behaviors;