Novel elemental CSS reactor: Design and application to zinc cadmium telluride deposition.

摘要

This document entails the work of integrating a novel close spaced sublimation (CSS) reactor from basic components and optimizing each of its systems to achieve reliability and repeatability in semiconductor thin film depositions. Therefore, it includes a study of Cadmium Telluride (CT), Zinc Telluride (ZT), and Cadmium-Zinc Telluride (CZT) thin films growth to prove the satisfactory performance of the reactor and to produce the baseline procedures for the deposition of such films. All of this is with the purpose of setting the foundations for further and more elaborate work on the films and to set the example for the operation of the reactor in the research of other films.;In an introductory note the background is laid out by describing the uses of CT, ZT and CZT films and the motivation for this work. Other thin film growth techniques are then explored and the mechanics of close spaced sublimation reactors are discussed. The novelty of the reactor is then described by remarking its differences to the standard CSS reactors. The reader is then fully familiarized with the system by means of a thorough schematic, pictorial and verbal description of the reactor and its subsystems.;The thesis then describes the optimizations the reactor underwent for the successful production of the above films. A literature review on the films is also furnished as a starting point for the design of the experiments to grow these films and test the reactor.;A quantitative and qualitative analysis of the results is then performed. Finally a future work section is then provided with the conclusions to describe the areas of improvement of the reactor and possible redesigns.