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Fabrication and characterization of integrated silicon nanowire electromechanical systems

机译：集成硅纳米线机电系统的制造与表征

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作者
Yu, Lin;
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作者单位

Purdue University;

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授予单位 Purdue University;
学科
学位 Ph.D.
年度 2011
页码 135 p.
总页数 135
原文格式 PDF
正文语种 eng
中图分类 AAI3475467;
关键词
Mechanical systems; Silicon nanowires; Silicon-on-insulator;

机译：机械系统;硅纳米线;绝缘体;

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2. Thermal and electromechanical characterization of top-down fabricated p-type silicon nanowires - IOPscience [J] . Alain Bosseboeuf, Pierre Etienne Allain, Fabien Parrain, Advances in Natural Sciences: Nanoscience and Nanotechnology . 2015,第2期

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机译：室温下自转换硅纳米线机电系统

Fabrication and characterization of integrated silicon nanowire electromechanical systems

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