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Enhanced mechanical performance of low dielectric constant thin films synthesized in supercritical carbon dioxide, and SANS studies of microemulsions induced or destabilized by compressed carbon dioxide

机译：超临界二氧化碳中合成的低介电常数薄膜的增强的机械性能，以及压缩二氧化碳诱导或破坏的微乳液的SANS研究

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作者
Romang, Alvin Horatio;
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作者单位

University of Massachusetts Amherst;

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授予单位 University of Massachusetts Amherst;
学科
学位 Ph.D.
年度 2012
页码 159 p.
总页数 159
原文格式 PDF
正文语种 eng
中图分类
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1. Lowering the dielectric constant of polyimide thin films by swelling with supercritical carbon dioxide [J] . Inga A. Ronova, Maria Bruma, Alexander A. Kuznetsov, Polymers for advanced technologies . 2013,第7期

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2. Condensation and cleaning of an organometallic copper compound to/from porous low-dielectric constant thin films in supercritical carbon dioxide [J] . E. Kondoh, E. Ukai, S. Aruga Physica status solidi . 2008,第5期

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3. Change of microstructure of polyimide thin films under the action of supercritical carbon dioxide and its influence on dielectric constant [J] . Ronova I. A., Bruma M., Sinitsyna O. V., Structural Chemistry . 2014,第6期

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4. Experimental Study on the Features of Hydraulic Fracture Created by Slickwater, Liquid Carbon Dioxide, and Supercritical Carbon Dioxide in Tight Sandstone Reservoirs [C] . Li S.H., Zhang S.C., Zou Y.S. U.S. Rock Mechanics/Geomechanics Symposium . 2018

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5. Spectroscopic ellipsometry analysis of nanoporous low dielectric constant films processed via supercritical carbon dioxide for next-generation microelectronic devices. [D] . Othman, Maslina T. 2007

机译：通过超临界二氧化碳处理的纳米微孔低介电常数薄膜的光谱椭圆偏振分析，适用于下一代微电子设备。
6. Synthesizing and Dispersing Silver Nanoparticles in a Water-in-Supercritical Carbon Dioxide Microemulsion [O] . Min Ji, Xiaoyuan Chen, Chien M. Wai, -1

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7. Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow Dielectric Constant Films [O] . T. Rajagopalan, S. Gangopadhyay, H. -c. Kim, 2003

机译：超临界二氧化碳萃取致孔剂制备超低介电常数薄膜
8. Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow Dielectric Constant Films [R] . Rajagopalan, T., Sun, J., Lahlouh, B., 2003

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Enhanced mechanical performance of low dielectric constant thin films synthesized in supercritical carbon dioxide, and SANS studies of microemulsions induced or destabilized by compressed carbon dioxide

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