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Spectroscopic investigation of hafnium-silicon oxynitride alloys and low temperature cobalt metal ALD

机译：-氮氧化硅合金和低温钴金属ALD的光谱研究

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作者
Oh, Sang Jeong;
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作者单位

North Carolina State University;

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授予单位 North Carolina State University;
学科
学位 Ph.D.
年度 2008
页码 140 p.
总页数 140
原文格式 PDF
正文语种 eng
中图分类
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Spectroscopic investigation of hafnium-silicon oxynitride alloys and low temperature cobalt metal ALD

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