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Fabrication and characterization of submicron polymer waveguides by micro-transfer molding.

机译:通过微传递模塑法制造和表征亚微米聚合物波导。

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摘要

Various methods exist for fabrication of micron and submicron sized waveguide structures. However, most of them include expensive and time consuming semiconductor fabrication techniques. An economical method for fabricating waveguide structures is introduced and demonstrated in this thesis. This method is established based on previously well-developed photonic crystal fabrication method called two-polymer microtransfer molding. The waveguide in this work functions by a coupler structure that diffracts the incident light into submicron polymer rods. The light is then guided through the rods. Characterization is done by collecting the light that has been guided through the waveguide and exits the end of these submicron polymer bars. The coupling and waveguiding capabilities are demonstrated using two light sources, a laser and white light.
机译:存在用于制造微米和亚微米尺寸的波导结构的各种方法。然而,它们中的大多数包括昂贵且费时的半导体制造技术。本文介绍了一种经济的波导结构制造方法。该方法是基于先前开发的称为二聚合物微传递模塑的光子晶体制造方法建立的。在这项工作中,波导通过耦合器结构起作用,该耦合器结构将入射光衍射到亚微米聚合物棒中。然后,光被引导通过杆。通过收集已引导通过波导并射出这些亚微米聚合物棒末端的光来完成表征。使用两个光源(激光和白光)演示了耦合和波导功能。

著录项

  • 作者

    Wu, Te-Wei.;

  • 作者单位

    Iowa State University.;

  • 授予单位 Iowa State University.;
  • 学科 Engineering Materials Science.
  • 学位 M.S.
  • 年度 2009
  • 页码 54 p.
  • 总页数 54
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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