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Fatigue properties of Graphene interconnects on flexible substrates.

机译:石墨烯互连在挠性基板上的疲劳特性。

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摘要

This thesis represents the first determination of the fatigue behavior of Graphene as interconnect material electronic components on flexible substrates. The potential application of this interconnect material is for displays on flexible substrates where fatigue resistance is required due to the stress placed on the interconnect during mechanical bending.;As the display is cyclically deformed (fatigued) during normal operation, cracks in the interconnect layer initiate and propagate leading to the lineout failure condition. The major contribution of this work is to show that Graphene is a superior interconnect material to the present state of the art Indium Tin Oxide (ITO) due to its electrical, optical and mechanical properties.;The experimental approach in this thesis is based on Graphene samples which were fabricated on Silicon Nitrite (Si3N4)/Polyethylene Naphthalate (PEN) substrates. For comparison, both patterned and uniform ITO films ITO films on Si3N4/PEN were fabricated. The results of the in-depth characterization of Graphene are reported and based on Atomic Force Microscopy (AFM), Raman Spectroscopy and Scanning Electron Microscopy (SEM) are reported.;The fatigue characteristics of ITO were determined at stress amplitudes ranging from 2000 MPa to 400 MPa up to 5000 cycles. The fatigue characteristics of Graphene were determined at stress amplitudes ranging from 80 GPa to 40 GPa up to 5000 cycles. The fatigue S-N curves were determined and showed that Graphene's endurance limit is 40 GPa. Beyond the endurance limit, there is no observable high cycle or low cycle fatigue indication for Graphene on a flexible substrate such as PEN. The microstructural analysis by SEM and AFM did not reveal normal fatigue crack growth and propagation.;This thesis presents the first comprehensive behavior of Graphene in a bending fatigue stress environment present in numerous flexible electronic applications. The design and stress environments for safe operation has been defined.
机译:本论文首次确定了石墨烯作为柔性基板上的互连材料电子组件的疲劳行为。这种互连材料的潜在应用是用于柔性基板上的显示器,这些柔性基板由于机械弯曲过程中施加在互连线上的应力而需要耐疲劳性;;由于显示器在正常运行期间会周期性变形(疲劳),因此互连层会产生裂纹并传播导致线路失败状态。这项工作的主要贡献是表明,由于石墨烯的电,光学和机械性能,它是当今铟锡氧化物(ITO)的优良互连材料。本论文中的实验方法基于石墨烯在亚硝酸硅(Si3N4)/萘二甲酸乙二醇酯(PEN)基板上制作的样品。为了比较,在Si 3 N 4 / PEN上制造了图案化的ITO膜和均匀的ITO膜。报道了石墨烯的深度表征结果,并基于原子力显微镜(AFM),拉曼光谱和扫描电子显微镜(SEM)进行了报道;确定了ITO的疲劳特性,其应力范围为2000 MPa至400 MPa至5000次循环。石墨烯的疲劳特性是在压力幅度从80 GPa到40 GPa直至5000次循环的情况下确定的。确定疲劳S-N曲线,结果表明石墨烯的耐力极限为40 GPa。超过耐久性极限,在柔性基材(例如PEN)上没有可观察到的石墨烯高循环或低循环疲劳迹象。扫描电镜和原子力显微镜的微观结构分析并未显示出正常的疲劳裂纹扩展和扩散。本文提出了石墨烯在众多柔性电子应用中存在的弯曲疲劳应力环境中的第一个综合行为。已经定义了安全操作的设计和压力环境。

著录项

  • 作者

    Paradee, Gary.;

  • 作者单位

    University of Maryland, College Park.;

  • 授予单位 University of Maryland, College Park.;
  • 学科 Engineering Materials Science.;Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2014
  • 页码 228 p.
  • 总页数 228
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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