Integrated silicon light modulator for fiber optic interconnects at 1.3 micron wavelength.

摘要

The dissertation describes the development of a novel high speed all-silicon device which intensity-modulates a 1.3 micron wavelength optical beam of the type used in optical fiber systems. The silicon integrated light modulator, SIMOD, uses free carrier dispersion to perform spatial optical phase modulation and the mode-filtering properties of a single-mode fiber to perform optical phase to amplitude modulation conversion. The device has several desirable and unique features: silicon monolithic integration and packaging compatibility, polarization independence, 200 MHz modulation bandwidth, low power consumption, small size, lensless direct coupling to optical fibers, low inherent noise, and many others. Potential applications include monolithic integration with silicon ICs, sensors and actuators, for computers, local area networks, environmental controls, avionics and automotive systems. The principle of operation, design, fabrication, optical performance and some potential applications of the SIMOD are described.; This device has been designed for use at the interface between short and medium distance fiberoptic communication systems and silicon integrated circuits.