High rate growth of YBCO films by photo-assisted metal-organic chemical vapor deposition.

摘要

The discovery of Yttrium-Barium-Copper-Oxide (YBCO) in 1987 made high temperature superconductors (HTSCs) become a hot topic for the scientists in the whole world. Since Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used for semiconductor film fabrication in the microelectronics industry, it could be a good candidate for commercial-scale HTSC production--if certain limitations can be overcome. Because YBCO is much more complex and anisotropic than most other commercialized materials fabricated by MOCVD, the task to prepare YBCO films for applications is very difficult. The required qualities of the YBCO films include phase purity, orientation purity, crystallinity, smooth surface morphology, high superconducting critical temperature (T