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Lasers and photodetectors for high-speed monolithic optoelectronics.

机译:用于高速单片光电的激光器和光电探测器。

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摘要

High speed monolithic optoelectronic integrated circuits (OEICs) promise to bring the high performance of optical systems to a practical price point. This dissertation describes the study of a photodetector and a laser especially well suited for OEICs.; The photodetector is a waveguide metal-semiconductor-metal design optimized for monolithic integration with high speed transistors. The waveguide shape was quantitatively analyzed to provide 50 GHz bandwidth and 90% internal quantum efficiency. A fabrication process was developed that featured self aligned quantum well disordering and self aligned electrode metallization.; The laser is a waveguide device with a triangular ring cavity which has been shown to have superior DC and low frequency characteristics in a highly manufacturable package. This work examines the modulation response of these lasers, with particular emphasis on aspects of the dynamic properties which are unique to the ring cavity structure. Relative intensity noise spectra and direct modulation spectra were measured to study the modulation properties. Both the ring lasers and standard fabry-perot lasers fabricated on the same chip were found to have modulation bandwidths determined by the differential gain and cavity length in the same way. The differential gain was completely predicted by the threshold current, and variations in the differential gain overwhelmed the relatively weak photon lifetime dependence of the modulation K-factor. The parasitic capacitance of the large contact pad filling the center of the ring structure was measured and found to be slightly smaller than the intrinsic diode junction capacitance. Ring lasers with 600 {dollar}mu{dollar}m cavity lengths had direct modulation bandwidths of 8-10 GHz at 100 mA, and were limited by catastrophic failure above 100 mA. The ring structure is shown to have the potential for reduced power consumption at moderate bandwidths (10GHz).; Highly unusual double peaked noise spectra were observed in the ring lasers. The cause of the second peak is proposed to be distant side modes near threshold. The distant side modes were encouraged by a coupled cavity effect caused by rough turning mirrors. Also, substantial low frequency noise was observed and attributed to uncompensated mode partition noise between the counterpropagating modes.
机译:高速单片光电集成电路(OEIC)有望将光学系统的高性能带到实用的价位。本文介绍了一种特别适用于OEIC的光电探测器和激光器的研究。光电探测器是一种波导金属-半导体-金属设计,针对与高速晶体管的单片集成进行了优化。对波导形状进行了定量分析,以提供50 GHz带宽和90%的内部量子效率。开发了一种以自对准量子阱无序和自对准电极金属化为特征的制造工艺。激光器是具有三角形环形腔的波导设备,已显示在高度可制造的封装中具有出色的DC和低频特性。这项工作研究了这些激光器的调制响应,特别强调了环形腔结构所独有的动态特性。测量了相对强度噪声谱和直接调制谱以研究调制特性。发现在同一芯片上制造的环形激光器和标准法布里-珀罗激光器都具有由差分增益和腔体长度以相同方式确定的调制带宽。差分增益完全由阈值电流预测,并且差分增益的变化使调制K因子相对较弱的光子寿命依赖性不堪重负。测量了填充环形结构中心的大接触垫的寄生电容,发现其略小于本征二极管的结电容。腔长为600μm的环形激光器在100 mA时具有8-10 GHz的直接调制带宽,并且受到100 mA以上的灾难性故障的限制。环形结构显示出在中等带宽(10GHz)时具有降低功耗的潜力。在环形激光器中观察到非常不寻常的双峰噪声谱。提出第二个峰值的原因是接近阈值的远端模式。粗糙的转向镜引起的耦合腔效应促进了远侧模式。同样,观察到大量低频噪声,并且归因于反向传播模式之间的未补偿模式分配噪声。

著录项

  • 作者

    Leary, Michael Howard.;

  • 作者单位

    Cornell University.;

  • 授予单位 Cornell University.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 1998
  • 页码 304 p.
  • 总页数 304
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

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