Control of run-by-run processes with applications to large-area material depositon.

摘要

In this work, the run-by-run control problem as it applies to large-area material deposition in electronics packaging is considered. The first part of the work presents a discussion of constructibility and controllability of linear run-by-run processes, and a new matrix Kalman filtering technique for identification of coefficients in a linear process. The next part of the work focuses on nonlinear run-by-run processes for which a new multiple-point block-form linearization technique that may be used to control a nonlinear process is derived. Then, in the third part of the work, identification and nonlinear control techniques are applied to meniscus coating and stencil printing. Methods for identification and control discussed in this work are applied to experimental data. In the case of meniscus coating, control techniques are able to generate process parameters that keep the process output closer to a target value than when the process is run open-loop.