In this thesis three compact microwave plasma disc reactor (MPDR) plasma sources, i.e. MPDR 7 - Side Feed (SF), MPDR 7 - End Feed Probe (EFP) and MPDR 7 - End Feed Loop (EFL), have been experimentally characterized by varying the input variables space (U1) and keeping the reactor geometry variables space (U2) fixed. The influence of three different coupling structures on the plasma source performance have been evaluated and compared with the global plasma model.; The measured internal variables (X) and output variables (Y) for the three plasma sources are: (1) plasma density, (2) absorbed power, (3) ion saturation current, (4) electron temperature, and (5) ion production costs. Additionally, electron energy distribution function, plasma potential, absolute and spatial electric fields are measured for the side feed excitation. The experimental technique involves single and double Langmuir probe measurements and E-field probe measurements.; The performance of the three investigated sources are compared in terms of ion production costs. The performance predictions from the global plasma model and the experimental results are compared and the differences are analyzed. Finally, an improved plasma source design is proposed.
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