Formation, characterization, and flow dynamics of nanostructure modified sensitive and selective gas sensors based on porous silicon.

摘要

Nanopore covered microporous silicon interfaces have been formed via an electrochemical etch for gas sensor applications. Rapid reversible and sensitive gas sensors have been fabricated. Both top-down and bottom-up approaches are utilized in the process. A nano-pore coated micro-porous silicon surface is modified selectively for sub-ppm detection of NH3, PH3 , NO, H2S, SO2. The selective depositions include electrolessly generated SnO2, CuxO, Au xO, NiO, and nanoparticles such as TiO2, MgO doped TiO 2, Al2O3, and ZrO2. Flow dynamics are analyzed via numerical simulations and response data. An array of sensors is formed to analyze mixed gas response. A general coating selection method for chemical sensors is established via an extrapolation on the inverse of the Hard-Soft Acid-Base concept.;In Chapter 1, the current state of the porous silicon gas sensor research is reviewed. Since metal oxide thin films, and, recently, nanowires are dominantly used for sensing application, the general properties of metal oxides are also discussed in this chapter. This chapter is concluded with a discussion about commercial gas sensors and the advantages of using porous silicon as a sensing material. The PS review discussed at the beginning of this chapter is an overview of the following publication: (1) "The Potential of Porous Silicon Gas Sensors", Serdar Ozdemir, James L. Gole, Current Opinion in Solid State and Materials Science, 11, 92-100 (2007).;In Chapter 2, porous silicon formation is explained in detail. Interesting results of various silicon anodization experiments are discussed. In the second part of this chapter, the microfabrication process of porous silicon conductometric gas sensors and gas testing set up are briefly introduced.;In chapter 3, metal oxide nanoparticle/nanocluster formation and characterization experiments via SEM and XPS analysis are discussed.;Chapter 4 is an overview of the test results for various concentrations NH3, NO, NO2 and PH3. The interaction strengths between the test gases and various nanoparticles on porous silicon are measured. The flow dynamics in the micro- and nanoporous regime is analyzed by using experimental response data and numerical simulations. The results in this chapter are partially published in the following articles: (1) "Porous Silicon Gas Sensors for Room Temperature Detection of Ammonia and Phosphine ", 214th Meeting of ECS: Honolulu, Hawaii Oct 12-17, 2008, S. Ozdemir, J.L. Gole, ECS Trans. 16 (11), 379 (2008). (2) "A Phosphine Detection Matrix Using Porous Silicon Gas Sensors" S. Ozdemir, J.L. Gole, Sensors and Actuators B, 151, 274-280 (2010). (3) "A Nanostructure Modified Porous Silicon Gas Sensor Detection Matrix for NO with Demonstration of the Transient Conversion of NO to NO2", Serdar Ozdemir, Thomas B. Osburn, James L. Gole, submitted to Journal of Electrochemical Society. (4) "Selectivity Improvement and Response Time Scale of Porous Silicon Conductometric Gas Sensors" S. Ozdemir, J. L. Gole, ECS Transactions, Volume 33, Issue 8, pg 111-115.;In chapter 5, a model is proposed for selectivity improvements in PS gas sensors based on Inverse of Hard Soft Acid Base interactions. An extended version of this chapter is published in the following publication: (1) " Nanostructure directed physisorption vs. chemisorption at semiconductor interfaces: the inverse of the hard-soft acid-base (HSAB) concept", J.L.Gole, S. Ozdemir, ChemPhysChem, 11, 2573.2581 (2010).;Chapter 6 is a brief conclusion of the results discussed in this thesis.