Etude et caracterisation des proprietes tribo-mecaniques de revetements deposes par plasma (French text).

摘要

The main objective of this project is to develop a methodology for the measurement tribo-mechanical properties; this methodology is then applied to the characterization of thin films fabricated by plasma enhanced chemical vapor deposition (PECVD) and also by other complementary deposition techniques. To achieve this goal, it is necessary to complete the following tasks: (i) extend the knowledge on the thin film tribo-mechanical behavior, (ii) evaluate the effect of the fabrication technique on the films' mechanical behavior and (iii) define general relationships between tribological and mechanical characteristic.; Elasto-plastic properties such as hardness H, Young's modulus E and elastic recovery R have been measured using depth-sensing nanoindentation with forces ranging from P = 100 muN to P = 10,000 muN. The characterization of the nanotribological properties, friction coefficient f, scratch resistance b and wear resistance &phis; were performed by the nanoscratch test with a progressive load (Pmax = 6,00 muN), and by the scanning wear test (P = 100 muN). (Abstract shortened by UMI.)