MEMS based Doppler velocity measurement system.

摘要

The design, fabrication, modeling and characterization of a capacitive micromachined ultrasonic transducer (cMUT) based in-air Doppler velocity measurement system using a 1 cm2 planar array are described. Continuous wave operation in a narrowband was chosen in order to maximize range, as it allows for better rejection of broadband noise. The sensor array has a 160-185 kHz resonant frequency to achieve a 10 degree beamwidth. A model for the cMUT and the acoustic system which includes electrical, mechanical, and acoustic components is provided. Furthermore, characterization of the cMUT sensor with a variety of testing procedures is provided. Laser Doppler vibrometry (LDV), beampattern, reflection, and velocity testing characterize the performance of the sensors. The sensor is capable of measuring the velocity of a moving specular reflector with a resolution of 5 cm/s, an update rate of 0.016 second, and a range of 1.5 m.