Piezoelectric jetting of polymers and its application in roll-to-roll nanoimprint lithography.

摘要

Nanoimprint Lithography is a promising nanofabrication technology that has the potential to greatly reduce cost over current optical lithography. A promising version of this method is Roll-to-Roll Nanoimprint Lithography (R2RNIL), which offers extremely high throughput, lower cost, and high resolution. In this research we have combined R2RNIL with a highly precise inkjet deposition method to evaluate the suitability of this production process in the creation of nanostructures. This thesis first investigates characteristics of the inkjet deposition of polymers, especially with regards to solute concentration in solution. We then investigate and optimize the imprinting method to produce structures as small as 1µm.