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Magnetic anisotropy of magnetostrictive terbium-iron/iron-cobalt multilayer thin film and iron-platinum nanoparticles.

机译:磁致伸缩ter铁/铁钴多层薄膜和铁铂纳米粒子的磁各向异性。

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摘要

This dissertation focuses on the characterization of giant magnetostrictive multilayer thin film structured [TbFe/FeCo]n for application to highly sensitive stress sensors and magnetic random access memory (MRAM) incorporated with magnetic tunneling junction (MTJ). It also concerns the magnetic properties of RF sputtered L10 FePt nanoparticles using a porous alumina template for ultra-high density data storage.; The effect of a stress-induced anisotropy on the magnetic properties of Tb0.4Fe0.6, Fe0.5Co0.5 single layer films and [Tb0.4Fe0.6/Fe0.5Co 0.5]n multilayers deposited on various substrates under different thermal treatments was studied. The in-plane radial anisotropy observed in the as-deposited films was eliminated by optimizing the sputtering parameters such as sputtering gas pressure, power and substrate to target distance. The effect of various treatments on the sample is discussed, including forming field, thermal annealing treatment and induced stresses. External stress was deliberately introduced by mechanically inducing a small curvature into the substrate before sputtering and releasing it after the sputtering and post sputtering thermal annealing. This stress anneal method was found to achieve excellent control of both the direction and magnitude of magnetic anisotropy in the sample. Magnetic hysteresis (M-H) loops in both parallel- and perpendicular- to-the-stress directions were measured to analyze the direction and magnitude of this induced anisotropy.; Beside stress anneal induced anisotropy, the exchange bias field attributed from exchange coupling effect was observed in the magnetic hysteresis (M-H) loops of strained FeCo/TbFe multilayer thin films. This exchange bias field was discussed theoretically from a model and investigated in detail relating to number of bilayers, thickness of each layer and field cool effect. This reproducible exchange bias field could be used in MTJ structured samples for stress sensors and MRAM applications.; Scanning Electron Microscopy (SEM) and Auger electron spectroscopy were used to study the morphology of the samples. The magnetic properties were measured using Superconducting QUantum Interface Device (SQUID) and Vibrating Sample Magnetoscopy (VSM).; The fabrication process of FePt nanoparticles using RF magnetron sputtered multilayers of Fe and Pt onto a porous alumina template was compared with a chemical synthesis method. The structural and magnetic characterization showed that magnetron sputtered FePt nanoparticles exhibited advantage in strong anisotropy energy and high thermal stability. In order to achieve FePt alloy nanoparticles with the face-centered tetragonal L1 0 structure for high density data storage application, post sputtered thermal treatment and various atomic composition of FePt alloy were investigated. Electrical measurement of nanoparticles after e-beam nanolithography of 100 nm gap patterns is purposed.; Preliminary research was done on stress sensors incorporated with magnetostrictive TbFe/FeCo multilayers and MTJ samples. This work can be continued by others as an extension of this dissertation.
机译:本论文着重研究了用于[TbFe / FeCo] n的大磁致伸缩多层薄膜结构的表征,该薄膜可应用于高度敏感的应力传感器和与磁隧道结(MTJ)结合的磁随机存取存储器(MRAM)。还涉及使用多孔氧化铝模板进行超高密度数据存储的RF溅射L10 FePt纳米粒子的磁性。应力诱导的各向异性对在不同热处理条件下沉积在各种基底上的Tb0.4Fe0.6,Fe0.5Co0.5单层膜和[Tb0.4Fe0.6 / Fe0.5Co 0.5] n多层膜的磁性能的影响被研究了。通过优化溅射参数,例如溅射气压,功率和衬底到目标距离,可以消除在沉积薄膜中观察到的面内径向各向异性。讨论了各种处理对样品的影响,包括成形场,热退火处理和诱导应力。通过机械地在溅射之前将小的曲率引入基板并在溅射和溅射后的热退火后释放基板,有意地引入了外部应力。发现这种应力退火方法可以很好地控制样品中磁各向异性的方向和大小。测量平行于应力方向和垂直于应力方向的磁滞回线(M-H),以分析这种各向异性的方向和大小。除了应力退火引起的各向异性外,在应变FeCo / TbFe多层薄膜的磁滞(M-H)回路中还观察到归因于交换耦合效应的交换偏置场。从模型上理论地讨论了该交换偏置场,并详细研究了双层的数量,每层的厚度和场冷效应。该可重现的交换偏置场可用于应力传感器和MRAM应用的MTJ结构化样本中。用扫描电子显微镜(SEM)和俄歇电子能谱仪研究了样品的形貌。磁性能使用超导量子接口设备(SQUID)和振动样品磁镜(VSM)进行测量。使用化学合成方法比较了使用RF磁控溅射Fe和Pt多层到多孔氧化铝模板上的FePt纳米颗粒的制造过程。结构和磁性表征表明,磁控溅射FePt纳米颗粒具有较强的各向异性能和较高的热稳定性。为了获得具有面心四方L1 0结构的FePt合金纳米颗粒用于高密度数据存储应用,研究了溅射后热处理和FePt合金的各种原子组成。目的是在电子束纳米光刻技术完成100 nm间隙图案后对纳米颗粒进行电学测量。对结合磁致伸缩TbFe / FeCo多层膜和MTJ样品的应力传感器进行了初步研究。其他工作可以作为本论文的延伸而继续。

著录项

  • 作者

    Tan, Jin-Hui.;

  • 作者单位

    State University of New York at Buffalo.;

  • 授予单位 State University of New York at Buffalo.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2007
  • 页码 194 p.
  • 总页数 194
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

  • 入库时间 2022-08-17 11:40:25

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