Thermal effects in three-dimensional recording by femtoano-second pulses


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Thermal effects are unavoidable in laser material processing and are present, to some extent, even in the case when ultra-short (sub-picosecond) pulsed irradiation is used. We discuss here the matters of high-precision energy delivery into micrometer-sized volumes for three-dimensional (3D) laser microfabrication. Precise account of the absorbed energy, pulse duration, and focal spot size allows to optimize laser processing parameters. As an example, a 3D micro-structuring of silica with better than 15 μm resolution is demonstrated by pulses of 11 ns duration and 266 nm wavelength (for a focusing by a low numerical aperture N A = 0.029 lens). The two photon absorption coefficient of silica, β approx= 60 ± 10 cm/GW, at 266 nm has been determined. The thermal black-body type emission of non-equilibrated electrons is discussed as a possible light source for 3D modification and structuring of photo-sensitive and photo-polymerizable materials. It is also demonstrated that optical properties of ionized dielectrics can be used to determine the temperature.
机译:热效应在激光材料加工中是不可避免的,甚至在使用超短(亚皮秒)脉冲辐照的情况下也存在一定程度的热效应。我们在这里讨论用于三维(3D)激光微加工的将高精度能量输送到微米级体积的问题。精确地吸收能量,脉冲持续时间和焦点尺寸可以优化激光加工参数。例如,通过11 ns持续时间和266 nm波长的脉冲(分辨率较低的N A = 0.029透镜聚焦)证明了分辨率优于15μm的二氧化硅的3D微结构。已确定二氧化硅在266 nm处的两个光子吸收系数β大约= 60±10 cm / GW。讨论了非平衡电子的热黑体型发射,将其作为3D修饰和结构化光敏和可光聚合材料的可能光源。还证明了电离电介质的光学性质可用于确定温度。



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