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Nodule growth in zirconium films prepared by ion beam sputtering

机译:离子束溅射法制备锆膜中的结核生长

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摘要

Zirconium films were deposited by ion beam sputtering method. A novel substrate holder was designed to realize the approximately in-situ observation the process of the nodule growth. The method of pre-setting particle seeds on the substrates was used in the film deposition. Optical microscope and SEM were presented in observation the specimen before and after annealing. An interesting growth mode of nodules which different from the reported in science literature was found in our experiment. The molecule dynamics theory and diffusion limited aggregation (DLA) model was presented to analysis this phenomenon.
机译:通过离子束溅射法沉积锆膜。设计了一种新型的基片支架,以实现原位观察结节生长的过程。在膜沉积中使用在基板上预先设置颗粒种子的方法。用光学显微镜和SEM观察样品的退火前后。在我们的实验中发现了一种有趣的结节生长模式,它不同于科学文献中报道的结节。提出了分子动力学理论和扩散限制聚集(DLA)模型来分析这种现象。

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