Deposition and Characterization of Al-CuO Reactive Composite Bridge Film

摘要

Al-CuO composite bridge films were successfully deposited on the substrates by means of magnetron sputtering. The morphology and phase constitution of the prepared samples were investigated by AFM, SEM and XRD. The Al-CuO composite bridge film was ignited using a constant voltage power supply. The current and temperature variations of Al bridge film and Al-CuO composite bridge film were compared during the electrification. The phase constitutions of the films after electrification were investigated by XRD. The results show that there was a chemical reaction initiated by the joule heat resulted from electrification in the Al-CuO composite bridge film.