Highly Oriented Co Soft Magnetic Films on Si Substrates

摘要

Thin Co and Co based aloy films with the face centered cubic (FCC) structure have been epitaxially grown on single crystal Si wafers by sputter deposition. Epitaxial orientation relationships have been determined by x-ray diffraction, x-ray pole figure scans and TEM. Magnetic properties have been characterized using vibrating sampling magnetometer (VSM), torque magnetometer and BH loop tracer. Soft magnetic properties have been observed for the pure Co films.