Multilayer Transparent Conducting Oxide Thin Film Produced by Linear Combinatorial Synthesis

摘要

Multilayer transparent conducting oxide (TCO) structures consisting of alternating layers of tin oxide (SnO_2 and cadmium oxide (CdO) pairs was studied. A low-pressure metalorganic chemical vapor deposition with a linear combinatorial approach was used to fabricate the libraries. Three libraries were studied with the pair thickness range covered from 500 nm to 4 nm. For pairs thicker than 150 nm, the material properties of the multilayer simply show a combination of CdO and SnO_2 characteristics. When pair thinner than 70 nm, the interface effect started emerging. As pairs became thinner than 20 nm, the new compound phase was formed.