首页> 外文会议>Symposium on Combinatorial and Artificial Intelligence Methods in Materials Science, Nov 26-29, 2001, Boston, Massachusetts, U.S.A. >Combinatorial optimization of atomically controlled growth for oxide films by the carrousel type laser molecular beam epitaxy
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Combinatorial optimization of atomically controlled growth for oxide films by the carrousel type laser molecular beam epitaxy

机译:卡鲁塞尔型激光分子束外延对氧化膜原子控制生长的组合优化。

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A new combinatorial pulsed laser deposition system has been developed for rapid optimization of epitaxial growth process by using a carrousel type masking plate. Under in-situ monitoring of growing surface with reflection high energy electron diffraction, eight films with different compositions or preparation parameters can be fabricated on a single substrate. By using this system, we have succeeded in the one lot optimization of YBa_2Cu_3O_(7-d)(YBCO), PrGaO_3, SrO and BaO film growths on the B-site (TiO_2) terminated SrTiO_3(001) substrates. Key results from these experiments include the high sensitivity of YBCO film crystallinity to the laser focusing as well as of growth behavior of epitaxial SrO and BaO films to the crystal habit with the underlying atomic layers.
机译:已经开发出一种新的组合脉冲激光沉积系统,以通过使用卡鲁塞尔型掩膜板快速优化外延生长工艺。在用反射高能电子衍射原位监测生长表面的情况下,可以在单个基板上制备八种具有不同成分或制备参数的膜。通过使用该系统,我们成功地完成了YBa_2Cu_3O_(7-d)(YBCO),PrGaO_3,SrO和BaO在B部位(TiO_2)终止的SrTiO_3(001)衬底上的薄膜生长的批量优化。这些实验的主要结果包括YBCO膜的结晶度对激光聚焦的高敏感性以及外延SrO和BaO膜对具有下面原子层的晶体习性的生长行为。

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