Combinatorial optimization of atomically controlled growth for oxide films by the carrousel type laser molecular beam epitaxy

摘要

A new combinatorial pulsed laser deposition system has been developed for rapid optimization of epitaxial growth process by using a carrousel type masking plate. Under in-situ monitoring of growing surface with reflection high energy electron diffraction, eight films with different compositions or preparation parameters can be fabricated on a single substrate. By using this system, we have succeeded in the one lot optimization of YBa_2Cu_3O_(7-d)(YBCO), PrGaO_3, SrO and BaO film growths on the B-site (TiO_2) terminated SrTiO_3(001) substrates. Key results from these experiments include the high sensitivity of YBCO film crystallinity to the laser focusing as well as of growth behavior of epitaxial SrO and BaO films to the crystal habit with the underlying atomic layers.